In the field of semiconductor manufacturing, precision machining technology is crucial for ensuring product quality and performance. Components such as Showerheads, serving as core elements in semiconductor processes, face numerous technical challenges in their machining.
Showerheads feature a large number of micro-holes with complex distributions. Micro-holes in different regions may have varying diameter and spacing requirements. This demands extremely high flexibility and precision from the machining process. AMTD employs multi-axis simultaneous CNC machining technology. By precisely controlling the movement of each axis of the machine tool, high-precision machining of complex micro-hole structures is achieved. Additionally, they have developed dedicated machining software capable of automatically generating tool paths according to design requirements, enhancing both machining efficiency and precision.
Material properties also significantly impact machining. Commonly used materials for semiconductor components, such as aluminum alloys and ceramics, are prone to issues like brittle fracture and work hardening during machining. AMTD adopts different machining strategies based on the characteristics of various materials. For aluminum alloy materials, they optimize cutting parameters and select appropriate cutting tools to reduce work hardening and deformation. For ceramic materials, special machining methods such as electrical discharge machining (EDM) and laser machining are employed, effectively addressing the challenges associated with their machinability.
Quality control is of paramount importance during the machining process. AMTD has established a comprehensive quality control system, with stringent checks at every stage from raw material inspection and in-process monitoring to finished product testing. They utilize advanced online inspection technology to monitor machining dimensions and surface quality in real-time, promptly identifying and resolving issues. Furthermore, rigorous performance tests are conducted on machined components to ensure they meet the requirements of semiconductor manufacturing.
As semiconductor technology continues to advance, the demands for machining accuracy and quality of components will become increasingly stringent. AMTD will continue to increase its R&D investment, continuously innovating and improving machining technologies to provide the semiconductor industry with even higher-quality precision machining solutions.
Source: Reference to "Special Machining Technology" and "Semiconductor Device Physics"
