In the field of precision machining for semiconductor manufacturing, the machining accuracy and quality of components directly determine the performance and yield of semiconductor products. Among them, the Showerhead (gas showerhead) serves as a critical component within the semiconductor process chamber, playing a vital role. It is responsible for uniformly distributing process gases onto the wafer surface, ensuring consistent gas distribution during processes such as deposition and etching, thereby influencing film uniformity and etching precision.
The machining of Showerheads faces numerous challenges. From a structural design perspective, it typically features complex arrays of micro-holes, which may number in the thousands or even tens of thousands, with precise control required over hole diameter, spacing, and distribution patterns. In terms of materials, common options like aluminum alloys and stainless steels are prone to issues such as deformation and work hardening during machining, impacting machining accuracy. Additionally, factors such as thermal stress and residual stress during the machining process can lead to dimensional changes in the components, further increasing machining difficulty.
AMTD)has conducted in-depth research and practice in the field of semiconductor precision machining. In Showerhead machining, they employ advanced CNC machining technology. Through high-precision CNC machine tools, coupled with carefully designed cutting tools and cutting parameters, high-precision machining of micro-holes is achieved. During the machining process, AMTD strictly controls cutting forces and cutting temperatures to minimize material deformation and work hardening. Simultaneously, they utilize online measurement technology to monitor machining dimensions in real-time and promptly adjust machining parameters to ensure that micro-hole accuracy meets requirements.
Apart from micro-hole machining, surface treatment of the Showerhead is also a critical step. AMTD adopts a combination of chemical polishing and electrochemical polishing methods, effectively improving surface finish, reducing gas adsorption and retention on the surface, and enhancing gas distribution efficiency. Furthermore, they conduct rigorous cleaning and inspection of the Showerhead to ensure the product is free from contamination and defects.
In semiconductor manufacturing, besides Showerheads, there are other critical components that also require precision machining, such as reaction chambers and gas delivery pipelines. These components similarly have stringent requirements for machining accuracy and quality. Leveraging its advanced technology and extensive experience, AMTD provides one-stop precision machining solutions for semiconductor manufacturing enterprises.
Source: Reference to "Introduction to Semiconductor Manufacturing Technology" and "Precision Machining Technology Manual"
