The rapid development of the semiconductor industry has placed increasingly higher demands on precision machining technology. During the semiconductor manufacturing process, the machining accuracy of components such as Showerheads directly impacts the stability of the entire process and the quality of chips.
The micro-hole machining of Showerheads stands as the core challenge in the entire machining process. The diameters of micro-holes are typically at the micron level. To achieve such high-precision machining, multiple factors such as tool material, cutting parameters, and machine tool accuracy need to be comprehensively considered. The selection of cutting tools is of utmost importance, as they need to possess high hardness, high wear resistance, and good toughness. AMTD has conducted extensive research and practice in tool selection. Based on different materials and machining requirements, they have chosen the most suitable tool types, effectively improving the machining accuracy and surface quality of micro-holes.
In terms of cutting parameter optimization, AMTD employs advanced simulation technology. By establishing a finite element model of the cutting process and simulating the distribution of cutting forces and cutting temperatures under different cutting parameters, they optimize the cutting parameters to reduce tool wear and material deformation. At the same time, they also pay attention to cooling and lubrication during the machining process. The use of specialized cutting fluids effectively reduces the cutting temperature and improves machining efficiency and quality.
Regarding the assembly and inspection of Showerheads, AMTD also has a set of strict standards and procedures. During the assembly process, they utilize high-precision positioning and clamping devices to ensure the fitting accuracy between various components. In terms of inspection, advanced measuring instruments such as coordinate measuring machines and optical microscopes are employed to conduct comprehensive inspections on the dimensions, shape, and surface quality of Showerheads, ensuring that the products meet the high standards required in semiconductor manufacturing.
In addition to Showerheads, AMTD has also achieved remarkable results in the precision machining of other semiconductor components. They continuously explore and innovate, providing strong technical support for the development of the semiconductor industry.
Source: Based on "Precision and Special Machining Technology" and "Principles of Semiconductor Device Processes"
