Semiconductor precision machining serves as the foundation and a critical link in semiconductor manufacturing, with the machining of components like Showerheads being of utmost importance. As semiconductor technology advances towards smaller linewidths and higher performance, the requirements for the machining accuracy and quality of components are becoming increasingly stringent.
The machining of a Showerhead involves multiple process steps, including blank preparation, micro-hole machining, and surface treatment. During the blank preparation stage, it is essential to select appropriate materials and conduct pre-treatment to enhance the machinability of the materials. AMTD boasts extensive experience in material selection. Based on different process requirements, they choose materials with good corrosion resistance, high strength, and low thermal expansion coefficient, laying a solid foundation for subsequent machining.
Micro-hole machining is the core step in Showerhead machining. AMTD adopts a composite machining process combining laser machining and mechanical machining. Laser machining features fast processing speed and high precision, enabling the rapid formation of the initial shape of micro-holes. Subsequently, mechanical machining is employed for finishing the micro-holes to further improve hole diameter accuracy and surface quality. This composite machining process fully leverages the advantages of both machining methods and effectively addresses the limitations of single machining methods in micro-hole machining.
Surface treatment is crucial for enhancing the performance and service life of Showerheads. AMTD utilizes surface treatment technologies such as anodizing and electroless plating to form a dense protective film on the surface of Showerheads, improving their corrosion resistance and wear resistance. Simultaneously, surface treatment can also enhance the optical properties of the surface, reducing gas reflection and scattering and improving gas distribution efficiency.
In semiconductor manufacturing, the reliability and stability of components are of paramount importance. AMTD has established a comprehensive quality management system, implementing strict quality control at every stage from raw material procurement to product delivery. They also closely collaborate with semiconductor manufacturing enterprises, continuously improving products and services based on customer feedback to provide high-quality semiconductor precision machining solutions.
Source: Reference to "Semiconductor Materials and Processes" and "Advanced Manufacturing Technology"
